4/9/2010	12:01:28 AM	Bypass valve opened
4/9/2010	12:04:02 AM	Bypass valve closed
4/9/2010	12:04:02 AM	Bypass valve opened
4/9/2010	12:04:04 AM	Bypass valve closed
4/9/2010	12:04:13 AM	Bypass valve opened
4/9/2010	12:05:48 AM	Bypass solenoid MFC set to  0.000000
4/9/2010	12:05:49 AM	Bypass valve closed
4/9/2010	12:06:56 AM	Helium MFC set to  500.000000
4/9/2010	12:08:00 AM	Helium valve opened
4/9/2010	12:08:06 AM	Bubbler valve opened
4/9/2010	12:08:08 AM	Bubbler valve closed
4/9/2010	12:08:22 AM	Bubbler valve opened
4/9/2010	12:09:35 AM	Bubbler valve closed
4/9/2010	12:09:36 AM	Helium valve closed
4/9/2010	12:09:37 AM	Bypass valve opened
4/9/2010	12:09:49 AM	Main Vac valve opened
4/9/2010	12:10:35 AM	Bypass valve closed
4/9/2010	12:10:36 AM	Main Vac valve closed
4/9/2010	12:10:37 AM	Helium valve opened
4/9/2010	12:11:44 AM	Tube furnace set to 22
4/9/2010	12:11:49 AM	Tube furnace set to 0
4/9/2010	12:11:56 AM	Tube furnace set to 37
4/9/2010	12:11:59 AM	Tube furnace set to 0
4/9/2010	12:12:11 AM	Bubbler valve opened
4/9/2010	12:12:14 AM	Bubbler valve closed
4/9/2010	12:12:19 AM	Bubbler valve opened
4/9/2010	12:12:23 AM	Bubbler valve closed
4/9/2010	12:12:27 AM	Bubbler valve opened
4/9/2010	12:12:30 AM	Bubbler valve closed
4/9/2010	12:12:35 AM	Bubbler valve opened
4/9/2010	12:12:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/9/2010	12:12:38 AM	Recipe started at 12:12 AM
4/9/2010	12:12:38 AM	Helium valve closed
4/9/2010	12:12:38 AM	H2 valve closed
4/9/2010	12:12:38 AM	BCl3 valve closed
4/9/2010	12:12:38 AM	PH3 valve closed
4/9/2010	12:12:38 AM	SiCl4 pre valve closed
4/9/2010	12:12:38 AM	SiCl4 post valve closed
4/9/2010	12:12:38 AM	Main Vac valve closed
4/9/2010	12:12:38 AM	Bubbler valve closed
4/9/2010	12:12:38 AM	Bypass valve opened
4/9/2010	12:12:38 AM	Helium MFC set to  0.000000
4/9/2010	12:12:38 AM	H2 MFC set to  0.000000
4/9/2010	12:12:38 AM	BCl3 MFC set to  0.000000
4/9/2010	12:12:38 AM	SiCl4 MFC set to  0.000000
4/9/2010	12:12:38 AM	Bypass solenoid MFC set to  0.000000
4/9/2010	12:12:38 AM	Tube furnace set to 0
4/9/2010	12:13:08 AM	Helium valve closed
4/9/2010	12:13:08 AM	H2 valve closed
4/9/2010	12:13:08 AM	BCl3 valve closed
4/9/2010	12:13:08 AM	PH3 valve closed
4/9/2010	12:13:08 AM	SiCl4 pre valve closed
4/9/2010	12:13:08 AM	SiCl4 post valve closed
4/9/2010	12:13:08 AM	Bubbler valve closed
4/9/2010	12:13:08 AM	Main Vac valve opened
4/9/2010	12:13:08 AM	Bypass valve opened
4/9/2010	12:13:08 AM	Helium MFC set to  0.000000
4/9/2010	12:13:08 AM	H2 MFC set to  0.000000
4/9/2010	12:13:08 AM	BCl3 MFC set to  0.000000
4/9/2010	12:13:08 AM	SiCl4 MFC set to  0.000000
4/9/2010	12:13:08 AM	Bypass solenoid MFC set to  0.000000
4/9/2010	12:13:08 AM	Tube furnace set to 0
4/9/2010	12:13:08 AM	Run finished at 12:13 AM
4/9/2010	12:13:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/9/2010	12:14:05 AM	Bypass valve closed
4/9/2010	12:14:05 AM	Bypass valve opened
4/9/2010	12:14:06 AM	Bypass valve closed
4/9/2010	12:14:06 AM	Main Vac valve closed
4/9/2010	12:14:10 AM	Helium MFC set to  500.000000
4/9/2010	12:14:12 AM	Helium valve opened
4/9/2010	12:15:43 AM	Bubbler valve opened
4/9/2010	12:17:48 AM	Bubbler valve closed
4/9/2010	12:17:51 AM	Bubbler valve opened
4/9/2010	12:17:52 AM	Bubbler valve closed
4/9/2010	12:17:54 AM	Bubbler valve opened
4/9/2010	12:17:56 AM	Bubbler valve closed
4/9/2010	12:17:58 AM	Bubbler valve opened
4/9/2010	12:19:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/9/2010	12:19:52 AM	Recipe started at 12:19 AM
4/9/2010	12:19:52 AM	Helium valve closed
4/9/2010	12:19:52 AM	H2 valve closed
4/9/2010	12:19:52 AM	BCl3 valve closed
4/9/2010	12:19:52 AM	PH3 valve closed
4/9/2010	12:19:52 AM	SiCl4 pre valve closed
4/9/2010	12:19:52 AM	SiCl4 post valve closed
4/9/2010	12:19:52 AM	Main Vac valve closed
4/9/2010	12:19:52 AM	Bubbler valve closed
4/9/2010	12:19:52 AM	Bypass valve opened
4/9/2010	12:19:52 AM	Helium MFC set to  0.000000
4/9/2010	12:19:52 AM	H2 MFC set to  0.000000
4/9/2010	12:19:52 AM	BCl3 MFC set to  0.000000
4/9/2010	12:19:52 AM	SiCl4 MFC set to  0.000000
4/9/2010	12:19:52 AM	Bypass solenoid MFC set to  0.000000
4/9/2010	12:19:52 AM	Tube furnace set to 0
4/9/2010	12:20:22 AM	Helium valve closed
4/9/2010	12:20:22 AM	H2 valve closed
4/9/2010	12:20:22 AM	BCl3 valve closed
4/9/2010	12:20:22 AM	PH3 valve closed
4/9/2010	12:20:22 AM	SiCl4 pre valve closed
4/9/2010	12:20:22 AM	SiCl4 post valve closed
4/9/2010	12:20:22 AM	Bubbler valve closed
4/9/2010	12:20:22 AM	Main Vac valve opened
4/9/2010	12:20:22 AM	Bypass valve opened
4/9/2010	12:20:22 AM	Helium MFC set to  0.000000
4/9/2010	12:20:22 AM	H2 MFC set to  0.000000
4/9/2010	12:20:22 AM	BCl3 MFC set to  0.000000
4/9/2010	12:20:22 AM	SiCl4 MFC set to  0.000000
4/9/2010	12:20:22 AM	Bypass solenoid MFC set to  0.000000
4/9/2010	12:20:22 AM	Tube furnace set to 0
4/9/2010	12:20:22 AM	Run finished at 12:20 AM
4/9/2010	12:20:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/9/2010	12:26:17 AM	Bypass valve closed
4/9/2010	12:26:29 AM	Bypass valve opened
4/9/2010	12:28:03 AM	Bypass valve closed
4/9/2010	12:28:09 AM	Bypass valve opened
4/9/2010	12:31:15 AM	Main Vac valve closed
4/9/2010	12:31:27 AM	Main Vac valve opened
4/9/2010	12:31:47 AM	Bypass valve closed
4/9/2010	12:32:01 AM	Bypass valve opened
4/9/2010	12:32:12 AM	Bypass valve closed
4/9/2010	12:32:50 AM	Bypass valve opened
4/9/2010	12:36:29 AM	Main Vac valve closed
4/9/2010	12:36:39 AM	Helium MFC set to  500.000000
4/9/2010	12:36:42 AM	Helium valve opened
4/9/2010	12:38:14 AM	Helium valve closed
4/9/2010	12:38:16 AM	Main Vac valve opened
4/9/2010	12:38:55 AM	Bypass valve closed
4/9/2010	12:38:56 AM	Bypass valve opened
4/9/2010	12:38:58 AM	Bypass valve closed
4/9/2010	12:39:17 AM	Bypass valve opened
4/9/2010	12:39:52 AM	Bypass valve closed
4/9/2010	12:39:57 AM	Bypass valve opened
4/9/2010	12:39:58 AM	Bypass valve closed
4/9/2010	12:39:59 AM	Bypass valve opened
4/9/2010	12:40:01 AM	Bypass valve closed
4/9/2010	12:40:04 AM	Main Vac valve closed
4/9/2010	12:40:12 AM	Bypass valve opened
4/9/2010	12:40:13 AM	Bypass valve closed
4/9/2010	12:40:14 AM	Bypass valve opened
4/9/2010	12:40:14 AM	Bypass valve closed
4/9/2010	12:40:15 AM	Main Vac valve opened
4/9/2010	12:40:16 AM	Bypass valve opened
4/9/2010	12:40:17 AM	Bypass valve closed
4/9/2010	12:40:18 AM	Bypass valve opened
4/9/2010	12:40:18 AM	Bypass valve closed
4/9/2010	12:40:20 AM	Bypass valve opened
4/9/2010	12:40:22 AM	Bypass valve closed
4/9/2010	12:40:23 AM	Bypass valve opened
4/9/2010	12:40:24 AM	Bypass valve closed
4/9/2010	12:40:25 AM	Main Vac valve closed
4/9/2010	12:40:26 AM	Bypass valve opened
4/9/2010	12:40:27 AM	Helium valve opened
4/9/2010	12:41:59 AM	Helium valve closed
4/9/2010	12:42:02 AM	Bypass valve closed
4/9/2010	12:42:02 AM	Bypass valve opened
4/9/2010	12:42:02 AM	Bypass valve closed
4/9/2010	12:42:03 AM	Bypass valve opened
4/9/2010	12:42:04 AM	Main Vac valve opened
4/9/2010	12:53:44 AM	Bypass valve closed
4/9/2010	12:53:46 AM	Main Vac valve closed
4/9/2010	12:54:06 AM	Bypass valve opened
4/9/2010	12:54:12 AM	Main Vac valve opened
4/9/2010	1:15:18 AM	Bypass valve closed
4/9/2010	1:16:01 AM	Main Vac valve closed
4/9/2010	1:16:16 AM	Main Vac valve opened
4/9/2010	1:16:37 AM	Bypass valve opened
4/9/2010	2:28:08 AM	Main Vac valve closed
4/9/2010	2:28:09 AM	Bypass valve closed
4/9/2010	2:28:42 AM	Bypass valve opened
4/9/2010	2:28:43 AM	Main Vac valve opened
4/9/2010	4:53:10 AM	Bypass valve closed
4/9/2010	4:53:11 AM	Main Vac valve closed
4/9/2010	4:53:45 AM	Bypass valve opened
4/9/2010	4:53:46 AM	Main Vac valve opened
4/9/2010	10:15:28 AM	Bypass valve closed
4/9/2010	10:15:29 AM	Main Vac valve closed
4/9/2010	10:33:32 AM	Bypass valve opened
4/9/2010	10:33:32 AM	Main Vac valve opened
